Surface depressions for die-to-die interconnects and associated systems and methods

ABSTRACT

Stacked microelectronic dies employing die-to-die interconnects and associated systems and methods are disclosed herein. In one embodiment, a stacked system of microelectronic dies includes a first microelectronic die, a second microelectronic die attached to the first die, and a die-to-die interconnect electrically coupling the first die with the second die. The first die includes a back-side surface, a surface depression in the back-side surface, and a first metal contact located within the surface depression. The second die includes a front-side surface and a second metal contact located at the front-side surface and aligned with the first metal contact of the first die. The die-to-die interconnect electrically couples the first metal contact of the first die with the second metal contact of the second die and includes a flowable metal layer that at least partially fills the surface depression of the first die.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No.12/874,076, filed Sep. 1, 2010, now U.S. Pat. No. 8,314,497, which is adivisional of U.S. application Ser. No. 12/147,957, filed Jun. 27, 2008,now U.S. Pat. No. 7,800,238, each of which is incorporated herein byreference in its entirety.

TECHNICAL FIELD

The present disclosure is directed generally to microelectronic diepackages, and more particularly to stacked microelectronic dies havingdie-to-die interconnects.

BACKGROUND

Packaged microelectronic assemblies, such as memory chips andmicroprocessor chips, typically include a microelectronic die mounted toa substrate and encased in a plastic protective covering. The dieincludes functional features, such as memory cells, processor circuits,and interconnecting circuitry. The die also typically includes bond padselectrically coupled to the functional features. The bond pads areelectrically connected to pins or other types of terminals that extendoutside the protective covering for connecting the die to busses,circuits, or other microelectronic assemblies. In one conventionalarrangement, the die is mounted (face down) to a supporting substrate(e.g., a printed circuit board), and the die bond pads are electricallycoupled to corresponding bond pads of the substrate with metal bumps(e.g., solder balls or other suitable connections). After encapsulation,additional metal bumps can electrically connect the substrate to one ormore external devices. Accordingly, the substrate supports the die andprovides an electrical link between the die and the external devices.

Die manufacturers have come under increasing pressure to reduce thevolume occupied by the dies and yet increase the capacity of theresulting encapsulated assemblies. To meet these demands, diemanufacturers often stack multiple dies on top of each other to increasethe capacity or performance of the device within the limited surfacearea on the circuit board or other element to which the dies aremounted.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional side view of a system of stackedmicroelectronic dies having die-to-die interconnects configured inaccordance with an embodiment of the disclosure.

FIGS. 2-6 illustrate stages of forming the system of FIG. 1 inaccordance with several embodiments of the disclosure.

FIGS. 7A and 7B illustrate, in more detail, stages of forming thedie-to-die interconnects of the system of FIG. 1.

FIGS. 8A and 8B illustrate stages of forming die-to-die interconnects inaccordance with another embodiment of the disclosure.

FIGS. 9A and 9B illustrate stages of forming die-to-die interconnects inaccordance with yet another embodiment of the disclosure.

FIG. 10 is a cross-sectional side view of a microelectronic workpiececarrying structures that can be used to form die-to-die interconnects inaccordance with another embodiment of the disclosure.

FIG. 11 is a schematic illustration of a system in which die-to-dieinterconnects may be incorporated.

DETAILED DESCRIPTION

Various embodiments of microelectronic dies and/or systems of dies thatinclude die-to-die interconnects are described below. In manyembodiments, such die-to-die interconnects can encompass a conductivestructure that electrically couples a metal contact at a front side of amicroelectronic die with a metal contact at a back-side of anothermicroelectronic die (e.g., including pass-through 3D interconnects orthrough-die or through-silicon vias). Such microelectronic dies canencompass a myriad of substrates having any of a variety of conductiveand/or nonconductive layers (e.g., metallic, semiconductive, and/ordielectric materials) that are situated upon and/or within one another.These substrates can also include a variety of electrical devices (e.g.,transistors, resistors, capacitors, etc.) or systems of such devices(e.g., an integrated circuit, a memory, a processor, etc.) formed in theconductive and/or nonconductive layers of an individual substrate. Otherembodiments of die-to-die interconnects, substrates, and microelectronicdies and/or systems of dies in addition to or in lieu of the embodimentsdescribed in this section may have several additional features or maynot include many of the features shown and described below withreference to FIGS. 1-11.

FIG. 1 is a cross-sectional side view of an embodiment of a system 100of stacked microelectronic dies 120 and 160. The first die 120 includesa back-side surface 121, surface depressions 124 in the back-sidesurface 121, and pass-through 3D interconnects 126 having individualback-side contact portions 128 in the surface depressions 124. Thepass-through interconnects 126, for example, can extend through thefirst die 120 to electrically couple the back-side contact portions 128to front-side pads on an opposing side of the first die 120. The seconddie 160 has a front-side surface 162 coupled to the back-side surface121 of the first die 120. The second die 160 also includes front-sidemetal contacts 184 (e.g., redistribution layer bond pads) located at thefront-side surface 162 that are aligned with the pass-throughinterconnects 126. In the embodiment of FIG. 1, the system 100 includesindividual die-to-die interconnects 110 coupling the back-side contactportions 128 of the first die 120 with the front-side contacts 184 ofthe second die 160. In several embodiments, the individual die-to-dieinterconnects 110 include flowable solder that at least partially fillsthe surface depressions 124 (e.g., alloys that include tin, silver,and/or copper, as well as other elemental constituents such as bismuth,indium, zinc, and/or lead). However, in other embodiments, thedie-to-die interconnects 110 can include other types of flowable metal.

Embodiments of the first die 120 can include a substrate 130, anintegrated circuit 132 carried by the substrate 130, and substrate bondpads 134 (or contacts) coupled to the integrated circuit 132. The firstdie 120 can have a first redistribution layer 140 at the front side ofthe substrate 130 that includes metal traces 142 coupling the substratebond pads 134 to front-side metal contacts 144. The first die can alsohave a dielectric layer 150 defining the back-side surface 121. Thedielectric layer 150 separates the substrate 130 from the second die 160and it spaces the substrate 130 apart from the die-to-die interconnects110. Similar to the first die 120, the second die 160 can include asubstrate 170, an integrated circuit 172 carried by the substrate 170,and substrate bond pads 174 coupled to the integrated circuit 172. Asecond redistribution layer 180 can be attached to the substrate 170 andinclude the front-side contacts 184 and optionally traces (not shown)electrically coupled to the substrate bond pads 174.

Embodiments of the system 100 can also include a dielectric casing 102encapsulating the first and second dies 120 and 160, and an interposersubstrate 190 carrying the first and second dies 120 and 160. Theinterposer substrate 190, for example, can be a printed circuit board orother substrate that includes die bond pads 192 and package bond pads194 electrically coupled to the die bond pads 192 through the substrate190. In several embodiments, individual bump bonds 196 or otherelectrical connectors are aligned with and attached to individualfront-side metal contacts 144 of the first die 120 and individual diebond pads 192 of the interposer substrate 190. Accordingly, individualpackage bond pads 194 can provide an electrical coupling to theintegrated circuit 132 of the first die 120 and/or the integratedcircuit 172 of the second die 160.

In many embodiments, the die-to-die interconnects 110 have undergone areflow process (described further with reference to FIGS. 7A and 7B)that allows individual die-to-die interconnects to at least partiallyfill corresponding surface depressions 124. The depressions 124 incombination with the reflowed die-to-die interconnects 110 enable thefirst and second dies 120 and 160 to be spaced apart by a very smalldie-to-die gap or spacing between the back-side and front-side surfaces121 and 162. For example, in the specific embodiment of FIG. 1, thedepressions 124 enable the front-side surface 162 of the second die 160to contact the back-side surface 121 of the first die 120 and thuseliminate a die-to-die gap between the first die 120 and the second die160. The system 100 can accordingly have a low overall height of a diepackage.

In contrast to the system 100, conventional die packages typicallyemploy dies having fixed and relatively large die-to-die gaps. Ingeneral, the size of a die-to-die gap is constrained to a minimum ofabout the size of conventional die-to-die interconnects. For example,conventional die packages can employ bump bonds having diameters rangingin size from 0.1 mm to 0.4 mm. The die-to-die gap of such packages isthus constrained to a minimum height of at least 0.1 mm to 0.4 mm. Thedie-to-die gap of conventional stacked packages can accordinglycontribute 0.1 mm to 0.4 mm to the overall height of the package foreach pair of stacked dies on a package. Stacked systems with three ormore dies that have multiple die-to-die gaps can further contribute tothe overall height of a die package.

The surface area of conventional die packages is also affected byconventional bump bonds because the diameter of bump bonds limits theminimum lateral spacing between front-side contacts or back-sidecontacts. Individual bump bonds generally cannot be electricallyconnected to each other across the surface of a die because suchconnections would cause shorting. As such, the center-to-center spacingbetween contacts is greater than the diameter of the bump bonds to avoidshorting. The spacing distance between bump bonds is typically muchgreater than diameter of the bump bonds to accommodate alignmenttolerances and because bump bonds typically bulge towards one anotherwhen compressed between dies.

Embodiments of the system 100, however, mitigate the issues associatedwith die-to-die gaps and lateral spacing requirements between diecontacts. In many embodiments, the system 100 can be manufactured byinitially positioning metal bumps between the back-side and front-sidecontacts of individual dies. The metal bumps can be heated and thenformed into individual surface depressions adjacent to back-sidecontacts. As the metal from the bumps flows into or otherwise forms tothe surface depressions, the die-to-die gap between individual dies isreduced or eliminated. In addition, because the metal flows intoindividual surface depressions that are electrically isolated from eachother, the back-side contacts of a die can be closely spaced. In severalembodiments, reflowed metal can be contained within individual surfacedepressions to prevent electrical contacts from becoming inadvertentlyelectrically shorted (described further with reference to FIGS. 9A and9B).

FIGS. 2-6 illustrate stages of methods for forming the system 100including the die-to-die interconnects 110 (FIG. 1) in accordance withseveral embodiments of the disclosure. FIG. 2 is a cross-sectional sideview of a microelectronic workpiece 204 (e.g., a semiconductor ormicroelectronic wafer) having a back-side surface 205, a front-sidesurface 206, and alignment features or fiducials 207 located at thefront-side surface 206. The alignment features 207 can be used toidentify locations at the back-side surface 205 and associate them withlocations at the front-side surface 206 (e.g., when defining a patternat the back-side surface 205; described further with reference to FIG.3B). FIG. 2 also shows the first redistribution layer 140 at thefront-side surface 206 and the pass-through interconnect 126 extendingbetween the front-side surface 206 and the back-side surface 205. Inmany examples, a backgrinding or chemical mechanical polish (CMP)process is used to thin the workpiece 204 such that the pass-throughinterconnect 126 projects slightly beyond the back-side surface 205. Thepass-through interconnect 126 can optionally extend through anindividual substrate bond pad 134, and the pass-through interconnect 126can be electrically coupled to the integrated circuit 132 via thesubstrate bond pad 134. In a specific embodiment, the pass-throughinterconnect 126 includes a plated metal, such as copper, but thepass-through interconnect 126 can also include other conductivematerials and/or semiconductive materials in other embodiments (e.g.,tungsten, titanium, titanium-nitride, etc.). A passivation layer 227(e.g., an aluminum oxide or silicon oxide layer) can also separate andelectrically isolate the pass-through interconnect 126 from thesubstrate 130 and optionally the substrate bond pad 134.

FIGS. 3A and 3B are cross-sectional side and top plan views of theworkpiece 204 after forming and patterning a masking layer 350 andetching the workpiece 204 to form the surface depressions 124. FIG. 3Ashows the workpiece 204 after an etch process has created a depressed orrecessed surface 321 relative to the back-side surface 205 at a siteadjacent to the pass-through interconnect 126. The recessed surface 321is the bottom of the depression 124. In several embodiments, aprojection portion 325 of the pass-through interconnect 126 projectsbeyond the recessed surface 321. The surface depression 124 can becircular, rectangular, or in other configurations, and the surfacedepression 124 can surround one or more interconnects in whole or inpart.

FIG. 3B also shows the relationship between the interconnects 126 andthe alignment feature 207. Although the alignment feature 207 isgenerally not visible at the back-side surface 205 using visibleradiation, it can be detected using an infrared light source or otherirradiation. The workpiece 204, for example, can be silicon, which isgenerally transparent to infrared light. An alignment tool can useinfrared light to detect the alignment feature 207 for subsequentpatterning and/or processing of the workpiece 204 at or above theback-side surface 205. In many embodiments, the surface depression 124can mitigate the extent to which the back-side surface 205 of theworkpiece 204 is roughened. Typically, the etching process carried outin FIGS. 3A and 3B can pit the recessed surface 321 or etch the recessedsurface 321 non-uniformly. Consequently, when infrared light impinges atthe recessed surface 321 (or is reflected back from the recessed surface321), the infrared light can scatter. Such scattering of the infraredlight decreases the optical resolution of the alignment feature 207,which in turn makes it more difficult to detect the alignment feature.However, referring again to FIG. 3A, the masking layer 350 protects thesurface quality of the back-side surface 205 above the alignment feature207 by preventing it from becoming roughened during an etch process. Assuch, infrared light employed to detect the alignment feature 207 willnot scatter such that the alignment feature 207 can be accuratelydetected.

FIG. 4A is a cross-sectional side view of the workpiece 204 afterforming the dielectric layer 150. In the example of FIG. 4A, the maskinglayer 350 (FIG. 3A) has been removed, and the dielectric layer 150 hasbeen formed at the back-side surface 205 and at the recessed surface321. The dielectric layer 150 can be spin-coated, for example, such thatthe dielectric layer 150 partially fills the surface depression 124 butdoes not cover a top-side portion 423 of the pass-through interconnect126. In several embodiments, an additional etching process can removeportions of the passivation layer 227 from side wall portions 429 of thepass-through interconnect 126 using, for example, a dilute hydrofluoric(HF) etch.

FIGS. 4B and 4C are cross-sectional side views of workpieces 404 a and404 b having alternative embodiments of the dielectric layer 150. FIG.4B shows a dielectric layer 450 a including a portion of the maskinglayer 350 and a spin-coated dielectric layer 452. In this example, themasking layer 350 is not removed after the etch process of FIGS. 3A and3B. Instead, the masking layer 350 is used in combination with thespin-coated dielectric layer 452 to create a surface depression 424 a.The masking layer 350 can include, for example, a silicon oxide materialor a polymeric material (e.g., polybutadiene (PBD) or benzocyclobutene(BCB)).

Referring to FIG. 4C, a dielectric layer 450 b is patterned to include asurface depression 424 b. In this embodiment, the back-side surface 205of the workpiece 404 b is not locally etched to form the recessedsurface 321 (FIGS. 3A and 3B), but rather the dielectric layer 450 b canbe patterned/etched to form a recessed surface 421. For example, thepass-through interconnect 126 can be initially formed through thesubstrate 130, and the back-side surface 205 can be globally etched suchthat the pass-through interconnect 126 extends above the back-sidesurface. The dielectric layer 450 b can then be deposited at theback-side surface 205 and the recessed surface 421 can be formedadjacent to the pass-through interconnect 126. The recessed surface 421can accordingly be employed in lieu of the recessed surface 321.

FIG. 5 is a cross-sectional side view of the workpiece 204 after formingthe back-side contact portion 128. In several embodiments, an under-bumpmetallization (UBM) material can be applied to the pass-throughinterconnect 126 to promote bonding of the die-to-die interconnect 110(FIG. 1). Such a UBM material can include, for example, layers ofnickel/palladium/gold or other alloys. In other embodiments, however,the UBM can be omitted and the die-to-die interconnect 110 can bedirectly connected to the sidewall portion 429 and/or the top-sideportion 423 of the pass-through interconnect 126.

FIG. 6 is a partially exploded cross-sectional side view of theworkpiece 204 during inter-die bonding and die singulation. The seconddie 160 is aligned with and coupled to the workpiece 204 by formingmetal bumps 612 between, respectively, the back-side contact portions128 and the front-side contacts 184. For example, the back-side surface121 of the workpiece 204 may include fiducials or other types ofalignment markers (not shown) for accurate alignment between thefront-side contacts 184 and the back-side contact portions 128 and/orthe pass-through interconnects 126. When the second die 160 is alignedwith the workpiece 204, the second die 160 can be pressed against theworkpiece 204 to sandwich individual metal bumps 612 in betweenindividual surface depressions 124 and individual front-side contacts184. Heat and pressure can be applied such that the metal bumps 612deform (or reflow) to produce the die-to-die interconnects 110 (FIG. 1).For example, a mechanical device (e.g., a clamp) can press together thesecond die 160 and the workpiece 204 while the workpiece 204 and thesecond die 160 are concurrently heated in a furnace chamber (generallybelow 300° F.). After deforming the metal bumps 612 (described in moredetail with reference to FIGS. 7A and 7B), the first die 120 can besingulated from the workpiece 204 via a die cutting process at substratecutting lanes 608 a and 608 b to separate the assembly of the first andsecond dies 120 and 160 from the workpiece 204. This assembly can thenbe mounted and electrically coupled to a variety of substrates, such asthe interposer substrate 190 (FIG. 1). In other embodiments, thisassembly can be coupled with other types of structures for carryingand/or electrically coupling with the first and second dies 120 and 160.

FIGS. 7A and 7B are cross-sectional side views showing, in more detail,an individual metal bump 612 being reflowed and conforming to a shapedefined by the surface depression 124, the front-side contact 184, andthe projection portion 325 of the pass-through interconnect 126. In theexamples of FIGS. 7A and 7B, the projection portion 325 is lined with aUBM material 728 that promotes bonding. In other examples, however, theUBM material 728 can be omitted. Referring to FIG. 7A, heat and pressureare applied to the metal bump 612 until the metal bump 612 deforms andat least partially fills a volume V₁ defined by the dielectric layer 150and the pass-through interconnect 126 within the surface depression 124.As the metal bump 612 deforms with applied heat and pressure, thefront-side surface 162 of the second die 160 moves towards the back-sidesurface 121 of the workpiece 204.

Referring to FIG. 7B, the metal bump 612 (FIGS. 6 and 7A) has deformeduntil it forms the die-to-die interconnect 110. In this example, thefront-side surface 162 of the second die 160 contacts the back-sidesurface 121 to eliminate a gap between the second die 160 and theworkpiece 204. In several embodiments, the die-to-die interconnect 110and/or metal bump 612 can have a volume V₂ that is less than or equal tothe volume V₁ of the surface depression 124 (FIG. 7A). However, in otherexamples, embodiments of the die-to-die interconnect 110 and/or metalbump 612 can also have a volume that is greater than the volume V₁.

FIG. 8A, for example, is a cross-sectional side view of a metal bump 812having a volume V₃ that is larger than the volume V₁ of the surfacedepression 124. FIG. 8B shows a corresponding die-to-die interconnect810 formed from the metal bump 812 and a die-to-die gap d₁ between theback-side surface 121 of the workpiece 204 and the front-side surface162 of the second die 160. As described above, the size of thedie-to-die gap d₁ can be adjusted by adjusting the ratio of the volumeof an individual metal bump (or other die-to-die interconnect structure)to the volume of a corresponding surface depression. For example, thevolume V₃ of the metal bump can be adjusted to minimize the die-to-diegap. Likewise, the volume of the surface depression 124 can also beadjusted.

In many embodiments, the above described metal reflowing techniques canbe used in lieu of direct bonding techniques. In general, direct bondingcan be carried out by bonding front-side die contacts with back-side diecontacts without employing any intermediary metal (i.e., the metal bumps612 and 812). Copper-to-copper bonding, for example, has the potentialfor allowing closer die-contact-to-die-contact spacings than have beenavailable with conventional solder bump bonding. Although promising,direct bonding techniques may not be readily available. In addition, thecost associated with these techniques may be prohibitive because theyrequire special tooling and processing equipment. The metal reflowtechniques described herein, however, can be readily carried out usingconventional tooling and microelectronic manufacturing processes.

For example, FIGS. 9A and 9B are cross-sectional side views showingmetal bumps 912 a and 912 b, and a process for reflowing the metal bumpsinto separate die-to-die interconnects 910 a and 910 b. In FIG. 9A, themetal bumps 912 a and 912 b are positioned between correspondingfront-side contacts 984 a and 984 b and corresponding surfacedepressions 924 a and 924 b and back-side contact portions 928 a and 928b. FIG. 9A also shows the metal bumps 912 a and 912 b contacting oneanother and spaced according to a pitch p₁. Prior to reflowing the metalbumps 912 a and 912 b, the front-side contacts 984 a and 984 b areelectrically shorted with each other, and the back-side contact portions928 a and 928 b are electrically shorted with each other. Referring nowto FIG. 9B, the metal bumps 912 a and 912 b (FIG. 9) have been reflowed,and the corresponding surface depressions 924 a and 924 b are filled,respectively, by the die-to-die interconnects 910 a and 910 b. FIG. 9Balso shows a front-side surface 962 contacting a back-side surface 921,and the die-to-die interconnects 910 a and 910 b being separated fromone another by these contacting surfaces. Thus, the front-side contacts984 a and 984 b are now electrically isolated from one another, and theback-side contact portions 928 a and 928 b are also electricallyisolated from one another.

Embodiments of die-to-die interconnects can also be formed using otherconfigurations of solder or flowable metal. FIG. 10 is a cross-sectionalside view of the workpiece 204 showing metal tier structures 1012attached to the back-side contact portions 128. Similar to metal bumps(see, e.g., the metal bump 612 of FIG. 6), the tier structures 1012 canbe reflowed and have a volume V₄ that can be sized according to thevolume V₁ of a corresponding surface depression 124 (FIG. 7A). The tierstructures 1012 can be formed by a process that includes (a) forming amask layer at the back-side surface 121, (b) patterning the mask layer,and (c) depositing one or more metal layers in the patterned portions ofthe mask layer. (The mask layer and the tier structures 1012 can also beformed at the front-side surface 162 of the second die 160; FIG. 6).After forming the tier structures 1012, the mask layer can be removed,the second die 160 can be positioned on top of the workpiece 204, andthe tier structures 1012 can be reflowed by a process similar to thatdescribed with reference to FIGS. 7A-9B.

Any one of the die-to-die interconnects described above with referenceto FIGS. 1-10 can be incorporated into any of a myriad of larger or morecomplex systems 1100, a representative one of which is shownschematically in FIG. 11. The system 1100 can include a processor 1101,a memory 1102 (e.g., SRAM, DRAM, Flash, or other memory device),input/output devices 1103, or other subsystems or components 1104.Microelectronic devices may be included in any of the components shownin FIG. 11. The resulting system 1100 can perform any of a wide varietyof computing, processing, storage, sensor, imaging, or other functions.Accordingly, representative systems 1100 include, without limitation,computers or other data processors, for example, desktop computers,laptop computers, Internet appliances, hand-held devices (e.g., palm-topcomputers, wearable computers, cellular or mobile phones, personaldigital assistants), multi-processor systems, processor-based orprogrammable consumer electronics, network computers, and minicomputers.Other representative systems 1100 include cameras, light or otherradiation sensors, servers and associated server subsystems, displaydevices, or memory devices. In such systems, individual dies can includeimager arrays, such as CMOS imagers. Components of the system 1100 maybe housed in a single unit or distributed over multiple, interconnectedunits, e.g., through a communications network. Components canaccordingly include local or remote memory storage devices and any of awide variety of computer-readable media.

From the foregoing, it will be appreciated that specific embodimentshave been described herein for purposes of illustration, but well-knownstructures and functions have not been shown or described in detail toavoid unnecessarily obscuring the description of the embodiments. Wherethe context permits, singular or plural terms may also include theplural or singular term, respectively. Moreover, unless the word “or” isexpressly limited to mean only a single item exclusive from the otheritems in reference to a list of two or more items, then the use of “or”in such a list is to be interpreted as including (a) any single item inthe list, (b) all of the items in the list, or (c) any combination ofthe items in the list. Additionally, the term “comprising” is usedthroughout to mean including at least the recited feature(s) such thatany greater number of the same feature or additional types of otherfeatures are not precluded.

It will also be appreciated that specific embodiments have beendescribed herein for purposes of illustration but that variousmodifications may be made within the claimed subject matter. Forexample, embodiments of the stacked system 100 can employ die-to-dieinterconnects 110 that electrically couple a variety of electricalcontacts, in addition to or in lieu of those that are associated withpass-through interconnects. In addition, interconnects may be employedin a variety of systems, including systems having two levels ofmicroelectronic dies or stacked systems of three or more levels ofmicroelectronic dies. The described methods of forming a stacked systemcan also include various modifications. The die-to-die interconnects110, for example, can be formed after the first die 120 has beensingulated from the workpiece 204. Furthermore, many of the elements ofone embodiment can be combined with other embodiments in addition to, orin lieu of, the elements of the other embodiments. For example,embodiments of the stacked system 100 can employ two or more differenttypes of die-to-die interconnects, such as those that are closely spaced(see, e.g., FIGS. 9A and 9B) and those that are more remotely spaced.Accordingly, the invention is not limited except as by the appendedclaims.

I claim:
 1. An interconnect structure for electrically coupling a firstmicroelectronic die with a second microelectronic die, comprising: ametal interconnect extending through the first die to a back-side of thefirst die and projecting beyond a recessed surface at the back-side ofthe die; a metal contact of the second die aligned with theinterconnect; and a layer of reflowed metal at least partiallysurrounding the interconnect and electrically coupling the interconnectto the metal contact of the second die, the layer of reflowed metalconforming to a shape defined by the recessed surface, the interconnect,and the metal contact of the second die.
 2. The interconnect structureof claim 1, further comprising a dielectric layer positioned between thelayer of reflowed metal and the recessed surface of the substrate. 3.The interconnect structure of claim 1, further comprising an under bumpmetallization layer positioned between the layer of reflowed metal and aportion of the interconnect.
 4. The interconnect structure of claim 1wherein the recessed surface, the interconnect, and the metal contactdefine a first volume, and wherein the layer of reflowed metal has anassociated second volume that is less than or equal to the first volume.5. A method of manufacturing a stacked system of microelectronic dies,the method comprising: aligning a pass-through interconnect at aback-side of a first microelectronic die and a metal contact at afront-side surface of a second microelectronic die, the pass-throughinterconnect being within and at least partially surrounded by a surfacedepression at the back-side of the first die; and coupling the metalcontact of the second die with the pass-through interconnect byreflowing a metal layer positioned between the metal contact and thepass-through interconnect, the reflowed metal layer at least partiallyfilling the surface depression of the first die.
 6. The method of claim5 wherein coupling the metal contact of the second die with thepass-through interconnect further comprises: positioning a metal solderbump between the metal contact of the second die and the pass-throughinterconnect; and reflowing the metal bump.
 7. The method of claim 5wherein the surface depression has an associated volume, and wherein themethod further comprises: employing a volumetric portion of the metallayer that is less than or equal to the volume of the surface depressionto contact the front-side surface of the second die with a back-sidesurface of the first die.
 8. The method of claim 5 wherein the surfacedepression has an associated volume, and wherein the method furthercomprises: employing a volumetric portion of the metal layer that isgreater than the volume of the surface depression to offset thefront-side surface of the second die from a back-side surface of thefirst die.
 9. The method of claim 5, further comprising forming adielectric layer that at least partially lines the surface depressionand separates the reflowed metal layer from a substrate of the firstdie.
 10. A method of manufacturing a microelectronic workpiece, themethod comprising: forming a mask layer on a back-side surface of amicroelectronic substrate having a pass-through interconnect extendingthrough the substrate; etching the substrate to form a surfacedepression including a recessed surface that is offset from theback-side surface within the substrate, wherein the pass-throughinterconnect has an end projecting beyond the recessed surface and intothe surface depression; and coupling the end of the pass-throughinterconnect with a die-to-die interconnect, wherein the surfacedepression electrically and mechanically isolates the die-to-dieinterconnect from other die-to-die interconnects formed at the back-sidesurface of the substrate.
 11. The method of claim 10 wherein the masklayer is configured to protect the back-side surface of the substrateduring the etch of the substrate.
 12. The method of claim 10, furthercomprising: removing the mask layer; and forming a dielectric layer thatlines the back-side surface and the recessed surface of the surfacedepression.
 13. The method of claim 10, further comprising: forming adielectric layer that lines the mask layer and the recessed surface ofthe surface depression.
 14. The method of claim 10, further comprising:reflowing the die-to-die interconnect, the reflowed die-to-dieinterconnect at least partially conforming to a shape defined by thesurface depression.